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US 9,312,468 B2Granted
Nano-piezoelectric generator and method of manufacturing the same
AssigneeSamsung Electronics Co., Ltd.
InventorsJung-inn Sohn, Seung-nam Cha
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Abstract
A nano-piezoelectric generator includes a first electrode and a second electrode, at least one nano-piezoelectric unit, formed of a semiconductor piezoelectric material having a nano-structure, disposed between the first and the second electrodes, and an interlayer, formed of an insulating material, disposed between the first electrode and the at least one nano-piezoelectric unit.
Claims21
A nano-piezoelectric generator comprising:
- a first electrode and a second electrode;
- at least one nano-piezoelectric unit, comprising a nano-structure formed of a semiconductor piezoelectric material, disposed between the first electrode and the second electrode;
- and
- an interlayer, formed of an insulating material, disposed on and substantially covering the first electrode, between the first electrode and the at least one nano-piezoelectric unit, such that the nano-structure extends between the insulating material at a first end of the nano-structure and the second electrode at a second end of the nano-structure, opposite the first end.
1 more element
A method of manufacturing a nano-piezoelectric generator, the method comprising:
- forming an interlayer, comprising an insulating material, on a first electrode;
- forming at least one nano-piezoelectric unit, comprising a nano-structure formed of a semiconductor piezoelectric material, on a second electrode;
- and
- bonding the at least one nano-piezoelectric unit to the interlayer.
1 more element
Dependencies are inferred from the claim text.