Integrated circuits and manufacturing methods thereof
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsAli Keshavarzi, Ta-Pen Guo, Helen Shu-Hui Chang, Hsiang-Jen Tseng, Shyue-Shyh Lin, Lee-Chung Lu, Chung-Cheng Wu, Li-Chun Tien, Jung-Chan Yang, Shu-Min Chen, Min Cao, Yung-Chin Hou
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