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US 9,312,232 B2Granted
Conductive bump, semiconductor chip and stacked semiconductor package using the same
AssigneeSK hynix Inc.
InventorHyeong Seok Choi
Life of this patent
Estimating the term…
Abstract
A conductive bump includes a step member formed to form a step on a portion of a connection pad; and a conductive member formed on the connection pad and the step member and having an inclined surface which is inclined with respect to the connection pad.
Claims11
A conductive bump comprising:
- a step member formed on a portion of a connection pad, formed of an insulation substance, and having the shape of a hemisphere;
- and
- a conductive member formed directly on the connection pad and the step member to have an inclined surface.
A stacked semiconductor package comprising:
- a plurality of semiconductor chips each including a semiconductor substrate having a first surface and a second surface which faces away from the first surface, a through via formed to pass through the first surface and the second surface of the semiconductor substrate, an upper bump having a step member formed on a portion of the through via and having the shape of a hemisphere, and a conductive member formed directly on the through via and the step member to have an inclined surface, and a lower bump formed on the second surface of the semiconductor substrate and electrically connected with the through via,
- wherein the plurality of semiconductor chips are stacked such that the upper bump of a lower semiconductor chip which is disposed at the lower among any two stacked semiconductor chips connects with the lower bump of an upper semiconductor chip which is disposed at the upper among any two stacked semiconductor chips.
Dependencies are inferred from the claim text.