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US 9,312,226 B2Granted
Semiconductor device having an identification mark
AssigneeInfineon Technologies AG
InventorsStefan Martens, Berthold Schuderer, Mathias Vaupel, Raimund Peichl
Life of this patent
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Abstract
A semiconductor device includes a chip, a contact pad arranged over the front side of the chip and an identification mark arranged over the contact pad. The identification mark includes an information about a property of the chip.
Claims17
A semiconductor device, comprising:
- a contact pad arranged over a front side of a chip, and comprising a metallic material, wherein the contact pad comprises a side wall arranged at a periphery of the contact pad, wherein the side wall surrounds a flat surface of the contact pad and the side wall protrudes from the flat surface, wherein the side wall comprises a first surface facing the chip, an exposed second surface facing away from the chip, and an exposed side surface extending from the first surface to the second surface, wherein the side surface is arranged at the periphery of the contact pad and defines a boundary of the contact pad;
- an active area arranged over the front side of the chip and adjacent to the contact pad, wherein the active area comprises an electronic component;
- a conductive structure arranged under the contact pad, wherein the conductive structure forms at least a part of the electronic component;
- a structured dielectric layer arranged under the contact pad, wherein the structured dielectric layer comprises a first section and a second section separated from the first section, wherein the structured dielectric layer forms at least a part of the electronic component, wherein a form of the side wall of the contact pad is similar to a form of the first section of the structured dielectric layer;
- and
- an identification mark arranged over the contact pad and comprising a same metallic material as the contact pad, wherein the identification mark is separated from the side wall of the contact pad and protrudes from the flat surface of the contact pad, wherein the identification mark comprises information about a property of the chip, and wherein a form of the identification mark is similar to a form of the second section of the structured dielectric layer, wherein the contact pad physically contacts the conductive structure over a substantial area of the contact pad, and wherein the contact pad is separated from the conductive structure by the structured dielectric layer at the side wall of the contact pad and at the identification mark.
3 more elements
A method, comprising:
- providing a semiconductor wafer comprising at least one chip;
- forming a contact pad over a front side of the chip and comprising a metallic material, wherein the contact pad comprises a side wall arranged at a periphery of the contact pad, wherein the side wall surrounds a flat surface of the contact pad and the side wall protrudes from the flat surface, wherein the side wall comprises a first surface facing the chip, an exposed second surface facing away from the chip, and an exposed side surface extending from the first surface to the second surface, wherein the side surface is arranged at the periphery of the contact pad and defines a boundary of the contact pad;
- providing an active area arranged over the front side of the chip and adjacent to the contact pad, wherein the active area comprises an electronic component;
- forming a conductive structure arranged under the contact pad, wherein the conductive structure forms at least a part of the electronic component;
- and
- forming a structured dielectric layer arranged under the contact pad, wherein the structured dielectric layer comprises a first section and a second section separated from the first section, wherein the structured dielectric layer forms at least a part of the electronic component, wherein a form of the side wall of the contact pad is similar to a form of the first section of the structured dielectric layer, wherein an identification mark is arranged over the contact pad and comprising a same metallic material as the contact pad, wherein the identification mark is separated from the side wall of the contact pad and protrudes from the flat surface of the contact pad, wherein the identification mark comprises information about a property of the chip, wherein a form of the identification mark is similar to a form of the second section of the structured dielectric layer, wherein the contact pad physically contacts the conductive structure over a substantial area of the contact pad, and wherein the contact pad is separated from the conductive structure by the structured dielectric layer at the side wall of the contact pad and at the identification mark.
3 more elements
Dependencies are inferred from the claim text.