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US 9,312,161 B2Granted
Accommodating device for retaining wafers
AssigneeEV Group E. Thallner GmbH
InventorsMarkus Wimplinger, Thomas Wagenleitner, Alexander Filbert
Life of this patent
Estimating the term…
Abstract
A receiving means for receiving and mounting of wafers. The receiving means includes a mounting surface. A mounting means is provided for mounting a wafer on the mounting surface. A compensation means is provided for active, especially locally controllable, at least partial compensation of local and/or global distortions of the wafer.
Claims17
Device for alignment of a first wafer with a second wafer with the following features:
- a means for determining local alignment errors which have occurred due to strain and/or distortion of the first wafer relative to the second wafer, with a first strain map of the first wafer and/or a second strain map of the second wafer and evaluation means for evaluation of the first and/or second strain maps,
- at least one receiving means for receiving at least one of the wafers, the at least one receiving means including a compensation means for active, at least partial compensation of local and/or global distortions of the wafer and
- alignment means for alignment of the wafers with consideration of position maps and/or strain maps and simultaneous compensation of the local alignment errors by the compensation means of the at least one receiving means.
Method for alignment of a first wafer with a second wafer with the following steps, especially the following sequence:
- detecting a first strain map of the first wafer and/or a second strain map of the second wafer and evaluation of the first and/or second strain maps by evaluation means and determination of the local alignment errors,
- receiving at least one of the wafers on a receiving means, the at least one receiving means including a compensation means for active, at least partial compensation of local and/or global distortions of the wafer and
- aligning the wafers with consideration of position maps and/or strain maps and simultaneous compensation of the local alignment errors by the compensation means of the at least one receiving means.
Dependencies are inferred from the claim text.