Transport apparatus and exposure apparatus
AssigneeNikon Corporation
InventorKazuya Ono
Life of this patent
Estimating the term…
Abstract
A substrate is transported between a first space and a second space, which are separated by a partition wall, through an opening portion formed in the partition wall. A transport apparatus includes a support device having a support portion which supports the substrate, the support device being provided so as to block the opening portion while a clearance between the partition wall and the support device is formed, the support device moving the support portion from a state where the support portion faces the first space to a state where the support portion faces the second space; and an adjustment device which adjusts an amount of the clearance, thereby suppressing the movement of fluid from the first space to the second space.
Claims25
A transport apparatus configured to transport a substrate between a first space and a second space, which are separated by a partition wall and are arranged along a first direction, through an opening portion formed in the partition wall, the apparatus comprising:
- a support member that is movable relative to the opening portion and includes (i) a support portion that supports the substrate, (ii) a first portion that is inserted into the opening portion when the support portion is positioned inside the first space, and (iii) a second portion that is inserted into the opening portion when the support portion is positioned inside the second space;
- a driving device that drives the support member along the first direction;
- and
- an adjustment device that adjusts, with respect to a second direction that crosses the first direction, an amount of a clearance between the partition wall and at least one of the first portion positioned inside the opening portion and the second portion positioned inside the opening portion by use of information regarding a clearance between the partition wall and at least one of the first portion positioned inside the opening portion and the second portion positioned inside the opening portion.
Dependencies are inferred from the claim text.