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US 9,312,152 B2Granted
Recirculation substrate container purging systems and methods
AssigneeBrooks Automation, Inc.
InventorLutz Rebstock
Life of this patent
Estimating the term…
Abstract
Methods and systems to reduce the consumption of purge gas for semiconductor substrate containers. The recirculation purging system recycles purge gas back to substrate containers by filtering and purifying gas flow from substrate containers, receiving gas flow from load port, or including a recirculation tank.
Claims7
A recirculation purging system, comprising:
- a container;
- a load port;
- wherein the container is disposed inside the load port;
- a purge gas flow input to the container;
- an exhaust purge gas flow output from the container;
- and
- a recirculation tank configured to provide a recirculated gas flow to the container and to accept an exhaust purge gas flow output from the container.
4 more elements
Dependencies are inferred from the claim text.