Vapor phase chemical mechanical polishing of magnetic recording disks
AssigneeHGST Netherlands B.V.
InventorsThomas E. Karis, Bruno Marchon, Bala K. Pathem, Franck D. Rose dit Rose, Kurt A. Rubin, Erhard Schreck
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Abstract
A method for polishing a carbon overcoat of a magnetic media that results in a smooth surface free of carbon cluster debris. The method involves forming a magnetic disk having a carbon overcoat formed thereon. The carbon overcoat is then polished in the presence of ozone (O3). The heat from the polishing process along with the presence of the ozone, cause any carbon particles removed by the polishing to form CO2 gas so that there is no remaining carbon particle debris on the surface of the disk.
Claims16
A method for manufacturing a magnetic media for magnetic data recording, comprising:
- forming a disk having a magnetic recording layer and a carbon overcoat formed over the magnetic recording layer;
- polishing the carbon overcoat;
- and
- while polishing the carbon overcoat, exposing the surface of carbon overcoat to ozone, wherein the polishing is performed such that friction from the polishing generates heat that causes particles of carbon removed by the polishing to convert to CO2 in the presence of the ozone.
A method for polishing a carbon surface, comprising:
- polishing the carbon surface;
- and
- while polishing the carbon surface, exposing the carbon surface to ozone, wherein the polishing is performed such that friction from the polishing generates heat that causes particles of carbon removed by the polishing to convert to CO2 in the presence of the ozone;
- wherein the polishing is performed using a polishing tape and wherein the exposure of the carbon surface to ozone includes introducing ozone to an interface between the carbon surface and the polishing tape.
Dependencies are inferred from the claim text.