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US 9,312,122 B2Granted
Rinse liquid for insulating film and method of rinsing insulating film
AssigneeCheil Industries Inc.
InventorsJin-Hee Bae, Han-Song Lee, Wan-Hee Lim, Go-Un Kim, Taek-Soo Kwak, Bo-Sun Kim, Sang-Kyun Kim, Yoong-Hee Na, Eun-Su Park, Jin-Woo Seo, Hyun-Ji Song, Youn-Jin Cho, Kwen-Woo Han, Byeong-Gyu Hwang
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Abstract
A rinse liquid for an insulation layer, the rinse liquid including a solvent represented by the following Chemical Formula 1:
Claims11
A rinse liquid for an insulation layer, the rinse liquid comprising:
- a solvent represented by the following Chemical Formula 1;
- and
- an auxiliary solvent, the auxiliary solvent including paraffin, or a derivative thereof, having a boiling point of about 190° C. to about 220° C. at atmospheric pressure,
- wherein, in the Chemical Formula 1,
- R1 is hydrogen, a substituted or unsubstituted C1 to C30 alkyl group, a substituted or unsubstituted C3 to C30 cycloalkyl group, a substituted or unsubstituted C6 to C30 aryl group, a substituted or unsubstituted C7 to C30 arylalkyl group, a substituted or unsubstituted C1 to C30 heteroalkyl group, a substituted or unsubstituted C2 to C30 heterocycloalkyl group, a substituted or unsubstituted C5 to C30 heteroaryl group, a substituted or unsubstituted C2 to C30 alkenyl group, a substituted or unsubstituted C2 to C30 alkynyl group, a substituted or unsubstituted alkoxy group, a substituted or unsubstituted carbonyl group, or a combination thereof, and
- Ra to Re are each independently hydrogen, a substituted or unsubstituted C1 to C30 alkyl group, a substituted or unsubstituted C3 to C30 cycloalkyl group, a substituted or unsubstituted C6 to C30 aryl group, a substituted or unsubstituted C7 to C30 arylalkyl group, a substituted or unsubstituted C1 to C30 heteroalkyl group, a substituted or unsubstituted C2 to C30 heterocycloalkyl group, a substituted or unsubstituted C5 to C30 heteroaryl group, a substituted or unsubstituted C2 to C30 alkenyl group, a substituted or unsubstituted C2 to C30 alkynyl group, a substituted or unsubstituted alkoxy group, a substituted or unsubstituted carbonyl group, a hydroxy group, a halogen, or a combination thereof.
3 more elements
Dependencies are inferred from the claim text.