Mass distribution spectrometry method and mass distribution spectrometer
AssigneeCanon Kabushiki Kaisha
InventorsMasafumi Kyogaku, Kota Iwasaki
Life of this patent
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Abstract
The present invention provides a mass distribution spectrometry which reduces an influence of the dispersion in the times at which ionizing beams irradiate a sample, on a mass spectrometry result, and can measure the mass distribution with high reliability. The mass distribution spectrometry is a mass spectrometry which includes irradiating the sample with a primary ion beam and detecting generated secondary ions, wherein this primary ion beam has a spread toward a direction perpendicular to a travelling direction, has a path length of each primary ion contained in the primary ion beam between a primary ion source and a surface of the sample adjusted by deflecting a trajectory, and is obliquely incident on the surface of the sample.
Claims17
A mass distribution spectrometry method including irradiating a sample with a primary ion beam and detecting a generated secondary ion,
- wherein the primary ion beam having a spread toward a direction perpendicular to a travelling direction is obliquely incident on a surface of the sample after a path length of each primary ion contained in the primary ion beam is adjusted by deflecting a trajectory between a primary ion source and the surface of the sample,
- wherein the mass distribution spectrometry method is a projection type mass distribution spectrometry method, and
- wherein path lengths of primary ions incident on arbitrary two points on the surface of the sample on which the primary ions are incident are adjusted so that:
- a difference of the path lengths of the primary ions incident on the two points becomes smaller than d*cos θ, when d is defined as a distance in an incident direction of the ion beam between the arbitrary two points which have been projected on a horizontal plane on the surface of the sample, and θ is defined as an incident angle of an ion which is incident on either one of the points out of the two points.
A mass distribution spectrometer including a primary ion irradiation unit and a detecting device for a secondary ion which has been generated by irradiation for a sample with a primary ion,
- wherein the primary ion irradiation unit is configured to:
- form a primary ion beam which has a spread toward a direction perpendicular to a travelling direction;
- adjust a path length of each primary ion contained in the primary ion beam between a primary ion source and a surface of the sample, by deflecting a trajectory of the primary ion, so that a difference of path lengths of primary ions incident on two arbitrary two points on the surface of the sample becomes smaller than d*cos θ, when d is defined as a distance in an incident direction of the ion beam between the arbitrary two points which have been projected on a horizontal plane on the surface of the sample, and θ is defined as an incident angle of an ion which is incident on either one of the points out of the two points;
- and
- irradiate the surface of the sample obliquely with the primary ion having the spread toward the direction perpendicular to the travelling direction, after the path length has been adjusted, and
- wherein the mass distribution spectrometer is configured to perform projection type mass distribution spectrometry.
A mass distribution spectrometer including a primary ion irradiation unit for irradiating a surface of a sample obliquely with a primary ion, and a detecting device for detecting a secondary ion which has been generated from the sample,
- wherein the primary ion irradiation unit has a deflection unit for deflecting paths of emitted primary ions toward an incident direction so that the emitted primary ions maintain a state having a spread toward a direction perpendicular to a travelling direction, so that amounts of time for the emitted primary ions to reach the surface of the sample become equal, and so that trajectories of the emitted primary ions are adjusted such that path lengths of all of the emitted primary ions become equal, and
- wherein the mass distribution spectrometer is configured to perform projection type mass distribution spectrometry.
A mass distribution spectrometry method including irradiating a sample with a primary ion beam and detecting a generated secondary ion,
- wherein the primary ion beam having a spread toward a direction perpendicular to a travelling direction is obliquely incident on a surface of the sample after a path length of each primary ion contained in the primary ion beam is adjusted by deflecting a trajectory between a primary ion source and the surface of the sample,
- wherein the mass distribution spectrometry method is a projection type mass distribution spectrometry method, and
- wherein the primary ion beam is incident on the surface of the sample, after the path length is adjusted between the primary ion source and the surface of the sample, so that amounts of time for primary ions to reach the surface of the sample become equal and path lengths of all of the primary ions become equal.
Dependencies are inferred from the claim text.