Sputtering apparatus

A rotary target cathode assembly for a sputtering apparatus, the rotary target cathode assembly comprising:

• a rotatable target cylinder having an inner surface that defines an interior passageway, the target cylinder configured at a proximal end for mounting to an end block of the sputtering apparatus;
• a target end cap affixed to a distal end of the target cylinder;
• a magnetron assembly disposed in the interior passageway of the target cylinder, the magnetron assembly comprising:
• an elongated support structure;
• at least one cooling pipe that extends along the support structure of the magnetron assembly;
• a magnet bar structure movably positioned below the support structure;
• a plurality of drive modules coupled to the support structure, the drive modules each including a motorized actuation mechanism operatively coupled to the magnet bar structure;
• a controller and battery module coupled to the support structure and in operative communication with the drive modules, the controller and battery module including an electronic controller and at least one rechargeable battery, the at least one rechargeable battery configured to energize each motorized actuation mechanism and the electronic controller;
• and
• one or more power generation modules coupled to the support structure and in electrical communication with the at least one rechargeable battery such that electrical energy output from the one or more power generation modules recharges the battery;
• wherein the one or more power generation modules are in fluid communication with the cooling pipe, and mechanical energy for driving the one or more power generation modules is harnessed from water that flows through the cooling pipe;
• wherein as the target cylinder erodes during operation of the sputtering apparatus, the motorized actuation mechanisms adjust the position of the magnet bar structure with respect to the inner surface of the target cylinder in response to control signals from the electronic controller.

A rotary target cathode assembly for a sputtering apparatus, the rotary target cathode assembly comprising:

• a rotatable target cylinder having an inner surface that defines an interior passageway, the target cylinder configured at a proximal end for mounting to an end block of the sputtering apparatus;
• a target end cap affixed to a distal end of the target cylinder;
• a magnetron assembly disposed in the interior passageway of the target cylinder, the magnetron assembly comprising:
• an elongated support structure;
• a magnet bar structure movably positioned below the support structure;
• a plurality of drive modules coupled to the support structure, the drive modules each including a motorized actuation mechanism operatively coupled to the magnet bar structure;
• a controller and battery module coupled to the support structure and in operative communication with the drive modules, the controller and battery module including an electronic controller and at least one rechargeable battery, the at least one rechargeable battery configured to energize each motorized actuation mechanism and the electronic controller;
• and
• one or more power generation modules coupled to the support structure and in electrical communication with the at least one rechargeable battery such that electrical energy output from the one or more power generation modules recharges the battery;
• wherein mechanical energy for driving the one or more power generation modules is harnessed from rotational energy of the target cylinder;
• wherein as the target cylinder erodes during operation of the sputtering apparatus, the motorized actuation mechanisms adjust the position of the magnet bar structure with respect to the inner surface of the target cylinder in response to control signals from the electronic controller.