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US 9,312,107 B1Granted
Disk handling apparatus and method for supporting a disk during material deposition at a deposition station
AssigneeWD Media, LLC
InventorKhoon H. Chean
Life of this patent
Estimating the term…
Abstract
A disk handling apparatus for supporting a disk during material deposition at a deposition station, comprising a disk vacuum paddle having a centrally disposed groove, and a vacuum source disposed within the groove, wherein the paddle contacts the disk only at disk corners on opposing major surfaces of the disk, and wherein the disk remains spaced from the groove at its outer diameter during material deposition.
Claims14
A disk handling apparatus for supporting a disk during material deposition at a deposition station, comprising:
- a disk vacuum paddle having a centrally disposed groove;
- and
- a vacuum source disposed within the groove;
- wherein the paddle contacts the disk only at disk corners on opposing major surfaces of the disk;
- and
- wherein the disk remains spaced from the groove at its outer diameter during material deposition;
- wherein a groove angle of the groove increases from a base of the groove to an upper portion of the groove such that the groove angle is 40 degrees with respect to the major surfaces of the disk at the base of the groove and the groove angle is 80 degrees with respect to the major surfaces of the disk at an upper portion of the groove.
4 more elements
A method for supporting a disk during material deposition at a deposition station, comprising:
- providing a disk vacuum paddle having a centrally disposed groove;
- providing a vacuum source disposed within the groove;
- inserting the disk within the disk paddle and proceeding with material deposition;
- and
- contacting the disk with the disk paddle only at disk corners on opposing major surfaces of the disk;
- wherein the disk remains spaced from the groove at its outer diameter during material deposition;
- wherein a groove angle of the groove increases from a base of the groove to an upper portion of the groove such that the groove angle is 40 degrees with respect to the major surfaces of the disk at the base of the groove and the groove angle is 80 degrees with respect to the major surfaces of the disk at an upper portion of the groove.
4 more elements
Dependencies are inferred from the claim text.