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US 9,312,104 B2Granted
Coil antenna with plural radial lobes
AssigneeApplied Materials, Inc.
InventorsVladimir Knyazik, Samer Banna, Kyle R. Tantiwong
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Abstract
A low inductance coil antenna for a plasma reactor has plural conductor lobes extending radially from respective RF supply connections.
Claims20
A coil antenna comprising:
- plural conductive lobes extending in respective radial directions with respect to a central axis, each of said plural conductive lobes comprising an elongate conductor having a first end and a second end;
- and
- a first connection to the first ends of said plural conductive lobes and a second connection to the second ends of said plural conductive lobes, said first and second connections being adapted for coupling to an RF power source, wherein said first and second connections comprise a pair of conductive rings around said central axis.
A coil antenna for use in a plasma reactor having a central axis, said coil antenna comprising:
- (a) plural conductive lobes, each of said plural conductive lobes comprising an elongate conductor having a pair of ends, respective ones of said plural conductive lobes extending radially from respective ones of said first and second ends along respective radial directions;
- (b) a pair of connection elements, respective ones of said pair of ends being coupled to respective ones of said pair of connection elements, wherein said pair of connection elements comprise a pair of conductive rings around said central axis;
- and
- (c) wherein said pair of connection elements is adapted to receive RF power.
1 more element
A coil antenna comprising:
- plural conductive lobes arranged with respect to a central axis, each of said conductive lobes comprising an elongate conductor having a first end and a second end, said plural conductive lobes extending along respective radial directions distributed about said central axis;
- and
- a pair of conductive rings around said central axis, said plural conductive lobes being connected in parallel at said first and second ends to said pair of conductive rings, said pair of conductive rings being adapted for coupling to an RF power source.
Dependencies are inferred from the claim text.