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US 9,312,092 B2Granted
Deflection plate and deflection device for deflecting charged particles
AssigneeSiemens Aktiengesellschaft
InventorsPeter Simon Aptaker, Paul Beasley, Oliver Heid
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Abstract
A deflection plate having a non-planar shape, for deflecting charged particles is provided. An associated method is also provided.
Claims5
A deflection device for deflecting charged particles, wherein the deflection device is configured to deflect a charged particle, which is moving in a third spatial direction, in a second spatial direction, the deflection device comprising:
- a first deflection plate;
- and
- a second deflection plate;
- wherein the first deflection plate and the second deflection plate have a non-planar shape, and are both curved about an axis oriented in a first spatial direction;
- wherein the second deflection plate is disposed in a mirror-imaged manner in relation to the first deflection plate;
- wherein the first spatial direction, the second spatial direction, and the third spatial direction are perpendicular to each other.
3 more elements
Dependencies are inferred from the claim text.