Inspection method and device therefor

A device for inspecting an inspection target, comprising:

• an image capture device configured to capture an image of a designated area of the inspection target;
• a detector configured to detect defects by creating a defect detection result image of the designated area based on the captured image;
• a recognizer configured to recognize circuit patterns by creating a circuit pattern recognition result image of the designated area based on the captured image, the circuit pattern recognition result image being different than the defect detection result image;
• a defect characteristic value computer configured to compute characteristic values related to the grey value of the captured image and shapes from the detected defects;
• a circuit pattern characteristic value computer configured to compute characteristic values related to the grey value of the captured image and shapes from the recognized circuit patterns;
• an extractor configured to extract circuit patterns by filtering from the defects detected by the detector and the circuit patterns recognized by the recognizer;
• an characteristic value determiner configured to determine characteristic values to be mapped among the characteristic values of the circuit patterns extracted by filtering by the extractor;
• and
• a display unit configured to display a distribution status of the characteristic values determined by the determiner on a screen in a map format.

An inspection method for inspecting an inspection target, the method comprising:

• capturing an image of a designated area of the inspection target using an image capturing device;
• detecting defects by creating a defect detection result image of the designated area based on the captured image;
• recognizing circuit patterns by creating a circuit pattern recognition result image of the designated area based on the captured image, the circuit pattern recognition result image being different than the defect detection result image;
• computing characteristic values related to the grey value of the captured image and shapes from the detected defects;
• computing characteristic values related to the grey value of the captured image and shapes from the recognized circuit patterns;
• extracting specific defects or circuit patterns by filtering from the detected defects and recognized circuit patterns;
• determining characteristic values to be mapped among the characteristic values of the specific defects or circuit patterns extracted by filtering;
• and
• displaying a distribution of the determined characteristic values on a screen in a map format,
• wherein recognizing circuit patterns comprises extracting an outline of the circuit patterns based on a change in a grey value and recognizing an inner region of the circuit patterns based on the grey value and a changing direction of the grey value.

A device for inspecting an inspection target, comprising:

• an image capture device configured to capture an image of a designated area of the inspection target;
• a detector configured to detect defects by creating a defect detection result image of the designated area based on the captured image;
• a recognizer configured to recognize circuit patterns by creating a circuit pattern recognition result image of the designated area based on the captured image, the circuit pattern recognition result image being different than the defect detection result image;
• a defect characteristic value computer configured to compute characteristic values related to the grey value of the captured image and shapes from the detected defects;
• a circuit pattern characteristic value computer configured to compute characteristic values related to the grey value of the captured image and shapes from the recognized circuit patterns;
• an extractor configured to extract specific defects or circuit patterns by filtering from the defects detected by the detector and the circuit patterns recognized by the recognizer;
• an characteristic value determiner configured to determine characteristic values to be mapped among the characteristic values of the specific defects or circuit patterns extracted by filtering by the extractor;
• and
• a display unit configured to display a distribution status of the characteristic values determined by the determiner on a screen in a map format,
• wherein the recognizer is configured to extract an outline of the circuit patterns based on a change in a grey value and recognize an inner region of the circuit patterns based on the grey value and a changing direction of the grey value.