Method for measuring displacement of planar motor rotor

A method for measuring the displacement of a rotor of a planar motor, characterized in that, the said method comprising:

• 1) a magnetic field is generated by a magnetic steel array (2) on a stator (1) of the planar motor and four magnetic induction intensity sensors are disposed on a rotor (3) of the planar motor;
• the coordinates of the first sensor (4) are (X1, Y1), the coordinates of the second sensor (5) are (X3, Y1), the coordinates of the third sensor (6) are (X2, Y2) and the coordinates of the fourth sensor (7) are (X4, Y2);
• the sampled signals of the first sensor, the second sensor, the third sensor and the fourth sensor are Ba, Bb, Bc and Bd respectively and the sampled signals Ba, Bb, Bc and Bd are processed in a signal processing circuit (8), wherein, the X-direction coordinates X1, X2, X3 and X4 are spaced apart from each other sequentially by a distance of one fourth of the X-direction magnetic field pitch τx of the planar motor, and the Y-direction coordinates Y1 and Y2 are spaced apart from each other by a distance of one fourth of the Y-direction magnetic field pitch τy of the planar motor;
• 2) supposing the X-direction displacement resolution as Δx and the Y-direction displacement resolution as Δy, the magnitude of the magnetic induction intensity of the magnetic field generated by the magnetic steel array (2) is measured as BM, the X-direction counting unit is initialized to be nx=0, the Y-direction counting unit is initialized to be ny=0, the X-direction magnetic field reference values are initialized to be
• B
• ksx
• =
• B
• a
• ⁢
• ⁢
• 0
• -
• B
• b
• ⁢
• ⁢
• 0
• 2
• ,
• B
• kcx
• =
• B
• c
• ⁢
• ⁢
• o
• -
• B
• d
• ⁢
• ⁢
• o
• 2
• ,
• and the Y-direction magnetic field reference values are initialized to be
• B
• ksy
• =
• B
• a
• ⁢
• ⁢
• 0
• +
• B
• b
• ⁢
• ⁢
• 0
• 2
• ,
• B
• kcy
• =
• B
• c
• ⁢
• ⁢
• 0
• +
• B
• d
• ⁢
• ⁢
• 0
• 2
• ,
• wherein Ba0, Bb0, Bc0 and Bd0 are respectively the sampled signals from the first sensor, the second sensor, the third sensor and the fourth sensor when the rotor of the planar motor is at the initial position;
• 3) the measurement starts, and the sampled signals Ba, Bb, Bc and Bd of the first sensor (4), the second sensor (5), the third sensor (6) and the fourth sensor (7) are obtained by sampling, and the sampled signals Ba, Bb, Bc and Bd are processed in the signal processing circuit (8) to obtain four signals Bsx, Bcx, Bsy and Bcy, wherein
• B
• sx
• =
• B
• a
• -
• B
• b
• 2
• ,
• B
• cx
• =
• B
• c
• -
• B
• d
• 2
• ,
• B
• sy
• =
• B
• a
• +
• B
• b
• 2
• ,
• B
• cy
• =
• B
• c
• +
• B
• d
• 2
• ;
• 4) it is determined by the signal processing circuit (8) whether the X-direction displacement is generated and whether the Y-direction displacement is generated,
• a. if the X-direction displacement is generated, then whether the X-direction displacement is forward or backward is needed to be determined further;
• and if the generated X-direction displacement has a forward direction, then the X-direction counting unit performs nx=nx+1, and if the generated X-direction displacement has a backward direction, then the X-direction counting unit performs nx=nx−1;
• and the X-direction magnetic field reference values are updated to Bksx=Bsx, Bkcx=Bcx;
• thus the X-direction displacement measurement is completed;
• if the X-direction displacement is not generated, then the X-direction displacement measurement is completed directly;
• and
• b. if the Y-direction displacement is generated, then whether the Y-direction displacement is forward or backward is needed to be determined further;
• and if the generated Y-direction displacement has a forward direction, then the Y-direction counting unit performs ny=ny+1, and if the generated Y-direction displacement has a backward direction, then the Y-direction counting unit performs ny=ny−1;
• and the Y-direction magnetic field reference values are updated to Bksy=Bsy, Bkcy=Bcy;
• thus the Y-direction displacement measurement is completed;
• if the Y-direction displacement is not generated, then the Y-direction displacement measurement is completed directly;
• 5) when the X-direction displacement measurement and the Y-direction displacement measurement are both completed, the X-direction relative displacement of the rotor of the planar motor is calculated as x=nx·Δx, and the Y-direction relative displacement is calculated as y=ny·Δy;
• and
• 6) the steps 3) to 5) are repeated to enable the real-time measurement for the displacement of the rotor of the planar motor.