Processing apparatus and article manufacturing method using same

An article manufacturing method comprising:

• processing en an object to be processed using a processing apparatus;
• and
• developing the object to be processed that has been processed;
• wherein the processing apparatus is configured to conduct a prescribed processing on an object to be processed in a specific environment, the processing apparatus comprising:
• a chamber configured to have an aperture and an interior accommodated to a specific environment;
• a mechanism of which at least a portion is contained within the chamber interior, while a remaining portion passes through the aperture without contacting the chamber;
• at least one support member configured to support the mechanism;
• a sealing member that configures a boundary of the specific environment and an atmospheric environment by connecting one end to the aperture and connecting the other end to the support member;
• and
• a rotary member configured to allow relative rotation around a vertical axis between the support member and a structure that supports the support member.