Negative resist composition and patterning process using same
AssigneeShin-Etsu Chemical Co., Ltd.
InventorsJun Hatakeyama, Hiroyuki Urano, Masashi Iio
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AssigneeShin-Etsu Chemical Co., Ltd.
InventorsJun Hatakeyama, Hiroyuki Urano, Masashi Iio
Estimating the term…
A negative resist composition containing as base resin a novolak resin having repeating unit “a”, wherein R1 represents a hydrogen atom, a hydroxy group, or any of a linear, a branched, or a cyclic alkyl group, alkoxy group, acyl group, acyloxy group, and alkoxy carbonyl group, these groups having 1 to 6 carbon atoms; and R2 represents a hydrogen atom, any of a linear, a branched, or cyclic alkyl group having 1 to 6 carbon atoms, alkenyl group having 2 to 10 carbon atoms, aryl group having 6 to 10 carbon atoms, which may contain a hydroxy group, an alkoxy group, an ether group, a thioether group, a carboxyl group, an alkoxy carbonyl group, and an acyloxy group. “A” is within the range of 0<a≦1. A negative resist composition, a chemically amplified resist composition, having a high resolution, pattern profile after exposure, and high durability as a permanent film.
A negative resist composition, comprising an organic solvent and. as a base resin thereof, a novolak resin which contains repeating unit “a” shown by the following general formula (1) and repeating unit “b1” shown by the following formula (2),
Dependencies are inferred from the claim text.