Electro-optical modulator with a vertical capacitor structure
AssigneeCisco Technology, Inc.
InventorsVipulkumar Patel, Prakash Gothoskar
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AssigneeCisco Technology, Inc.
InventorsVipulkumar Patel, Prakash Gothoskar
Estimating the term…
An optical modulator may include a leftmost waveguide, a rightmost waveguide, and a dielectric layer disposed therebetween. In one embodiment, the waveguides may be disposed on the same plane. When a voltage potential is created between the rightmost and leftmost waveguides, these layers form a silicon-insulator-silicon capacitor (also referred to as SISCAP) structure that provides efficient, high-speed optical modulation of an optical signal passing through the modulator. As opposed to a horizontal SISCAP structure where the dielectric layer is disposed between upper and lower waveguides, arranging the dielectric layer between waveguides disposed on the same plane results in a vertical SISCAP structure. In one embodiment, the leftmost and rightmost waveguide are both made from crystalline silicon.
An optical device, comprising:
An optical device, comprising:
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