Controller for actuating a micromechanical actuator, actuating system for actuating a micromechanical actuator, micro-mirror system and method for actuating a micromechanical actuator

An actuating system for actuating a micromechanical actuator in a closed loop circuit, comprising:

• a first signal generator to output a reference signal;
• a controller unit for actuating a micromechanical actuator in a closed loop circuit, including:
• a first signal input to receive the reference signal;
• a second signal input to receive a measuring signal which denotes a recorded response by the micromechanical actuator to a control signal;
• a first controller element to at least one of filter and attenuate at least one of predefined frequency modes and predefined frequency components in a received reference signal and to output at least one of a filtered and attenuated reference signal;
• a second controller element to modify a received measuring signal to minimize a quality of at least one of a first mode and further modes of the closed loop circuit and to output a modified measuring signal;
• a third controller element to minimize a deviation between the at least one of the filtered and attenuated reference signal and the received measuring signal and to output a minimized reference signal;
• and
• a fourth controller element to adapt the received measuring signal to adapt a bandwidth of the closed loop circuit and to add an adapted measuring signal to a sum of a minimized reference signal and the modified measuring signal, which creates a control signal, and to receive the reference signal and to output the control signal for the micromechanical actuator;
• a first signal processing unit to process the control signal and to transmit the control signal to the micromechanical actuator;
• and
• a second signal processing unit to record a response by the micromechanical actuator to the control signal and to transmit the measuring signal to the controller, which denotes the recorded response.

A micro-mirror system, comprising:

• at least one micro-mirror, and at least one actuating system to actuate the micro-mirror in a closed loop circuit, the actuating system being for actuating a micromechanical actuator in a closed loop circuit, comprising:
• a first signal generator to output a reference signal;
• a controller unit for actuating a micromechanical actuator in a closed loop circuit, including:
• a first signal input to receive the reference signal;
• a second signal input to receive a measuring signal which denotes a recorded response by the micromechanical actuator to a control signal;
• a first controller element to at least one of filter and attenuate at least one of predefined frequency modes and predefined frequency components in the received reference signal and to output the at least one of the filtered and attenuated reference signal;
• a second controller element to modify the received measuring signal in order to minimize a quality of at least one of a first mode and further modes of the closed loop circuit and to output a modified measuring signal;
• a third controller element to minimize a deviation between the at least one of the filtered and attenuated reference signal and the received measuring signal and to output a minimized reference signal;
• and
• a fourth controller element to adapt the received measuring signal in order to adapt a bandwidth of the closed loop circuit and to add the adapted measuring signal to a sum of the minimized reference signal and the modified measuring signal, which creates a control signal, and to receive the reference signal and to output the control signal for the micromechanical actuator;
• a first signal processing unit to process the control signal and to transmit the control signal to the micromechanical actuator;
• and
• a second signal processing unit to record a response by the micromechanical actuator to the control signal and to transmit the measuring signal to the controller, which denotes the recorded response.

A method for actuating a micromechanical actuator in a closed loop circuit, comprising:

• receiving a reference signal;
• receiving a measuring signal which denotes a recorded response by the micromechanical actuator to a control signal;
• at least one of filtering and attenuating at least one of predefined frequency modes and predefined frequency components in the reference signal;
• modifying the received measuring signal in order to minimize a quality of at least one of a first mode and further modes of the closed loop circuit;
• minimizing a deviation between the at least one of filtered and attenuated reference signal and the received measuring signal and outputting a minimized reference signal;
• adapting a bandwidth of the closed loop circuit by adapting the received measuring signal;
• and
• transmitting a sum of the minimized reference signal and the modified measuring signal as well as the adapted measuring signal as the control signal to the micromechanical actuator.