Compound microscope device

A compound microscope device comprising:

• a transmission electron microscope including an electron gun that releases an electron ray toward a specimen, an electromagnetic object lens that images the electron ray, and a detection part into which the electron ray, having passed through the electromagnetic object lens, enters;
• a fluorescent microscope including a light source that emits excitation light to irradiate the specimen, a light object lens that collects fluorescent light emitted from the specimen, and a light detection part into which the fluorescent light is entered;
• and
• a reflection mirror arrangement that comprises one reflection mirror including a mounting center hole larger in diameter than a beam diameter of the electron ray, wherein
• the electromagnetic object lens is formed by a cylindrical coil and a yoke covering the coil,
• the yoke has a notch constituting a pole piece,
• the one reflection mirror of the reflection mirror arrangement is disposed on an electron-optical path between upper and lower poles of the pole piece,
• the electron ray passes through the mounting center hole of the one reflection mirror,
• the excitation light is reflected by the reflection mirror arrangement toward the specimen,
• the fluorescent light is reflected by the one reflection mirror toward the light object lens,
• electron ray irradiation and excitation light irradiation are coaxially performed on the specimen, and
• simultaneous observation is made by the electron microscope and the fluorescent microscope.