Single chip scanning lidar and method of producing the same
AssigneeHRL Laboratories, LLC
InventorsKeyvan Sayyah, Pamela R. Patterson, Oleg M. Efimov
Life of this patent
Estimating the term…
Abstract
A chip-scale scanning lidar includes a two dimensional (2D) scanning micromirror for a transmit beam and a 2D scanning micromirror for a receive beam, a laser diode and a photodetector, a first waveguide and first grating outcoupler coupled to a front facet of the laser diode, a second waveguide and a second grating outcoupler coupled to a rear facet of the laser diode on a substrate. A first fixed micromirror, a second micromirror, a third micromirror, and a focusing component are in a dielectric layer bonded to the substrate over the laser diode and photodetector. The photodetector is optically coupled to the second fixed micromirror and the third fixed micromirror for coherent detection.
Claims27
A method of fabricating a chip-scale scanning lidar comprising:
- forming a two dimensional (2D) scanning micromirror for a transmit beam on a substrate;
- forming a two dimensional (2D) scanning micromirror for a receive beam on the substrate;
- forming a laser diode on the substrate;
- forming a photodetector on the substrate;
- forming a first waveguide on the substrate connected on one end of the first waveguide to a first facet of the laser diode;
- forming a first grating outcoupler on the substrate connected to another end of the first waveguide;
- forming a second waveguide on the substrate connected on one end of the second waveguide to a second facet of the laser diode;
- forming a second grating outcoupler on the substrate connected to another end of the second waveguide;
- forming a first fixed micromirror and a second fixed micromirror in a first dielectric layer;
- forming a third fixed micromirror in a second dielectric layer;
- forming a focusing component in a third dielectric layer;
- bonding the first, second and third dielectric layers together to form a composite structure;
- aligning the composite structure to the substrate over the laser diode and photodetector;
- and
- bonding the composite structure to the substrate over the laser diode and photodetector.
A chip-scale scanning lidar comprising:
- a substrate;
- a two dimensional (2D) scanning micromirror for a transmit beam on the substrate;
- a two dimensional (2D) scanning micromirror for a receive beam on the substrate;
- a laser diode on the substrate;
- a photodetector on the substrate;
- a first waveguide on the substrate connected on one end of the first waveguide to a first facet of the laser diode;
- a first grating outcoupler on the substrate connected to another end of the first waveguide;
- a second waveguide on the substrate connected on one end of the second waveguide to a second facet of the laser diode;
- a second grating outcoupler on the substrate connected to another end of the second waveguide;
- a first fixed micromirror in a dielectric layer, the first fixed micromirror optically coupled to the first grating outcoupler;
- a second fixed micromirror in the dielectric layer, the second fixed micromirror optically coupled to the second grating outcoupler;
- a third fixed micromirror in the dielectric layer the third fixed micromirror optically coupled to the two dimensional (2D) scanning micromirror for the receive beam;
- and
- a focusing component in the dielectric layer the focusing component optically coupled to the third fixed micromirror;
- wherein the photodetector is optically coupled to the second fixed micromirror and the third fixed micromirror for coherent detection;
- and
- wherein the dielectric layer is aligned to and bonded to the substrate over the laser diode and photodetector.
Dependencies are inferred from the claim text.