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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsTung-Tsun Chen, Jui-Cheng Huang, Chin-Hua Wen, Chun-wen Hung Cheng, Yi-Shao Jonathan Liu
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One or more semiconductor devices and array arrangements and methods of formation are provided. A semiconductor device includes an ion sensing device and a heating element proximate the ion sensing device. The ion sensing device has an active region, including a source, a drain, and a channel, the channel situated between the source and the drain. The ion sensing device also has an ion sensing film situated over the channel, and an ion sensing region over the ion sensing film. Responsive to a temperature sensed by a thermal sensor proximate the ion sensing device, the heating element is selectively activated to alter a temperature of the ion sensing region to promote desired operation of the semiconductor device, such as to function as a bio sensor. Multiple semiconductor devices can be formed into an array.
A semiconductor device, comprising:
A method of forming a semiconductor device comprising:
An array, comprising:
Dependencies are inferred from the claim text.