Device for inspecting substrate having irregular rough surface and inspection method using same

A substrate inspection method for inspecting a light non-transmissive substrate having an irregular concave-convex surface for scattering lights and a light transmissive substrate having an irregular concave-convex surface for scattering lights, the substrate inspection method comprising:

• transporting the substrate with respect to a first detection system which detects any luminance unevenness from the entire concave-convex surface of the substrate and a second detector system which detects a pattern defect of the concave-convex surface of the substrate;
• irradiating the concave-convex surface of the substrate with a first detection light to detect the light coming from the concave-convex surface by the first detection system, and irradiating the concave-convex surface of the substrate with a second detection light having a wavelength different from that of the first detection light to detect the light coming from the concave-convex surface by the second detection system, when the light non-transmissive substrate is transported;
• and
• irradiating the irregular concave-convex surface of the substrate with the first detection light from a surface of the light transmissive substrate disposed on a side opposite to the concave-convex surface to detect the light coming from the concave-convex surface by the first detection system, and irradiating the irregular concave-convex surface of the substrate with the second detection light from the surface of the light transmissive substrate disposed on the opposite side to detect the light coming from the concave-convex surface by the second detection system, when the light transmissive substrate is transported.