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US 9,310,289 B2Granted
Systems, devices, and methods including a dark-field reflected-illumination apparatus
AssigneeTokitae LLC
InventorsMatthew R. Behrend, Michael C. Hegg, Matthew P. Horning, Benjamin K. Wilson
Life of this patent
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Abstract
Systems, devices, and methods are described that modulate a specimen-background dark-field micrograph contrast.
Claims8
A method of modulating a specimen-background dark-field micrograph contrast, comprising:
- varying an illumination-collection spacing by varying at least one of an illumination angle of incidence or a collection aperture dimension, based on a detected dark-field contrast differential.
Dependencies are inferred from the claim text.