Appearance inspection apparatus and appearance inspection method with uneveness detecting

An appearance inspection apparatus comprising:

• a first illuminating unit configured to cast a slit light on a surface of a sample under inspection, the slit light being green wavelength light;
• a first camera configured to acquire reflected luminance data on the surface of the sample by receiving reflected light of the slit light;
• a second illuminating unit configured to cast two lights of blue wavelength and red wavelength on a position other than a position illuminated by the slit light on the sample surface from two different directions so as to overlap the two lights with each other;
• a second camera configured to acquire surface data on the sample surface by receiving reflected light from the position where the two lights are overlapped with each other;
• a shaping inspection unit configured to acquire green component images from the reflected luminance data;
• a color component separating unit configured to acquire red component images and blue component images from the surface data;
• an unevenness defect detecting unit configured to detect presence or absence of surface unevenness from a ratio between intensities of the two lights contained in the surface data;
• an extraneous color defect detecting unit configured to detect changes in color tone on the sample surface by normalizing the green component images, the red component images and the blue component images and synthesizing the normalized green component images, the red component images and the blue component images into a 2D color image;
• and
• a gloss defect detecting unit configured to detect gloss on the sample surface based on the presence or absence of surface unevenness and the changes in color tone of the 2D color image.