Tactile sensor and multi-axial tactile sensor
AssigneeThe University of Tokyo
InventorsIsao Shimoyama, Kiyoshi Matsumoto, Akihito Nakai, Hidetoshi Takahashi
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Abstract
A tactile sensor and a multi-axial tactile sensor are provided, each of which is thin and can measure shearing force. A multi-axial tactile sensor 1 includes a sensor element 2 provided in a plane substantially at the same level as the surface of a substrate 6, and an outer package member 42 covering around the sensor element 2 and transmitting external force to the sensor element 2. The sensor element 2 includes a flexible beam 7 (8) having at least one end supported by the substrate 6. The sensor element 2 detects deformation of the beam 7 (8), the deformation being caused in the direction in parallel with the surface of the substrate 6.
Claims13
A tactile sensor comprising:
- a sensor element provided in a plane substantially at the same level as a surface of a substrate, and
- an outer package member covering around the sensor element and transmitting external force to the sensor element, wherein
- the substrate has a hole in a rectangular shape,
- the sensor element includes:
- a flexible doubly-supported beam stretched between one side and the other side of the hole facing each other and having both ends supported by the substrate;
- or a flexible cantilever having one end supported by the substrate so as to extend from the one side toward the other side of the hole opposite to the one side,
- the outer package member covers a top surface, a surface opposite to the top surface and side surfaces opposite to each other of the doubly-supported beam or the cantilever, and
- the sensor element detects deformation of the doubly-supported beam or the cantilever, the deformation being caused in a direction in parallel with the surface of the substrate.
A multi-axial tactile sensor comprising
- a plurality of sensor elements provided in a plane substantially at the same level as the surface of a substrate, and
- an outer package member covering around the sensor elements and transmitting external force to the sensor elements, wherein
- the substrate has a hole in a rectangular shape,
- the sensor elements each include:
- a flexible doubly-supported beam stretched between one side and the other side of the hole facing each other and having both ends supported by the substrate;
- or a flexible cantilever having one end supported by the substrate so as to extend from the one side toward the other side of the hole opposite to the one side,
- the outer package member covers a top surface, a surface opposite to the top surface and side surfaces opposite to each other of the doubly-supported beam or the cantilever, and
- the sensor elements detect deformation of the doubly-supported beam or the cantilever, the deformation being caused in the direction in parallel with the surface of the substrate.
Dependencies are inferred from the claim text.