Measuring device for high-precision optical determination of distance or position

A measuring device for high-precision optical determination of distance and/or position, comprising:

• a light source;
• at least one optical functional element arranged as a plane mirror;
• two imaging elements;
• and
• a detector system;
• wherein the optical functional element is adapted such that at least one of at least two sub-beams impinges on the optical functional element three times before the sub-beams propagate, interferingly superposed, in a direction of the detector system, the detector system adapted to generate at least one phase-encoded measuring signal from the superposed sub-beams;
• wherein between the impingements on the optical functional element, the sub-beam passes through the imaging elements, the imaging elements having imaging factors such that no location and directional shear of the interfering sub-beams results if the optical functional element tilts out of a setpoint position;
• wherein the imaging elements are adapted to displace emergent sub-beams relative to incident beams of rays;
• wherein for the imaging factors of a number of N imaging elements, the following conditions are satisfied:
• N=2,m1=−2, and m2=−½;
• and
• wherein n=1 . . . N and mn represents an imaging factor of an nth imaging element.