US 9,309,983 B2 · Fluid control apparatus joint, and fluid control apparatus

Abstract

A fluid draw-off block joint includes an inlet channel, an outlet channel, and a closure portion. The inlet channel has a first end communicating with an outlet channel of a single-line block joint, and a second end communicating with an inlet channel of an outlet on-off valve. The outlet channel has a first end communicating with an outlet channel of the outlet on-off valve, and a second end being open through a side surface in a line exit direction. The closure portion closes an opening of a bifurcated channel of a plural-line block joint.

Drawings

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Drawings

Claims6

Dependent claims

A fluid control apparatus joint,

the fluid control apparatus including a plurality of lines arranged in parallel, with inlets of all the lines being oriented in a same direction and outlets of all the lines being oriented in a same direction, each of the lines having a plurality of fluid control devices arranged on an upper stage and a plurality of joint members arranged on a lower stage,
each of the lines including an outlet on-off valve as one of the fluid control devices, and a single-line block joint and an plural-line block joint both as the joint members supporting the outlet on-off valve,
the outlet on-off valve having an inlet channel and an outlet channel both being open through a lower surface of the outlet on-off valve,
the single-line block joint having an inlet channel and an outlet channel both being open through an upper surface of the single-line block joint, and each of the single-line block joints being provided for each line,
the plural-line block joint, in the fluid control apparatus as a whole, having:
a fluid draw-off channel extending in a direction orthogonal to the lines;
and a plurality of bifurcated channels being open through an upper surface of the plural-line block joint, and the plural-line block joint being common to the plurality of lines,
the fluid control apparatus joint,
being block-shaped, and
being disposed such that an upper surface of the fluid control apparatus joint butts against the lower surface of the outlet on-off valve, and a lower surface of the fluid control apparatus joint contacts the upper surface of the single-line block joint and the upper surface of the plural-line block joint,
the fluid control apparatus joint including:
an inlet channel having a first end being open through the lower surface of the fluid control apparatus joint and communicating with the outlet channel of the single-line block joint, and a second end being open through the upper surface of the fluid control apparatus joint and communicating with the inlet channel of the outlet on-off valve;
an outlet channel having a first end being open through the upper surface of the fluid control apparatus joint and communicating with the outlet channel of the outlet on-off valve, and a second end being open in a line exit direction;
and
a closure portion closing an opening of the bifurcated channel of the plural-line block joint.

12 more elements

A fluid control apparatus including a plurality of lines arranged in parallel, with inlets of all the lines being oriented in a same direction and outlets of all the lines being oriented in a same direction, each of the lines having a plurality of fluid control devices arranged on an upper stage and a plurality of joint members arranged on a lower stage,

each of the lines including an outlet on-off valve as one of the fluid control devices, and a single-line block joint and an plural-line block joint both as the joint members supporting the outlet on-off valve,
the outlet on-off valve having an inlet channel and an outlet channel both being open through a lower surface of the outlet on-off valve,
the single-line block joint having an inlet channel and an outlet channel both being open through an upper surface of the single-line block joint, and each of the single-line block joints being provided for each line,
the plural-line block joint, in the fluid control apparatus as a whole, having:
a fluid draw-off channel extending in a direction orthogonal to the lines;
and a plurality of bifurcated channels being open through an upper surface of the plural-line block joint, and the plural-line block joint being common to the plurality of lines,
the fluid control apparatus further including a fluid control apparatus joint being block-shaped, and being disposed such that an upper surface of the fluid control apparatus joint butts against the lower surface of the outlet on-off valve, and a lower surface of the fluid control apparatus joint contacts the upper surface of the single-line block joint and the upper surface of the plural-line block joint,
the fluid control apparatus joint including:
an inlet channel having a first end being open through the lower surface of the fluid control apparatus joint and communicating with the outlet channel of the single-line block joint, and a second end being open through the upper surface of the fluid control apparatus joint and communicating with the inlet channel of the outlet on-off valve;
an outlet channel having a first end being open through the upper surface of the fluid control apparatus joint and communicating with the outlet channel of the outlet on-off valve, and a second end being open in a line exit direction;
and
a closure portion closing an opening of the bifurcated channel of the plural-line block joint.

9 more elements

Dependencies are inferred from the claim text.

Description5,785 words

Summary2,274 words

#1. Field of the Invention

#The present invention relates to a fluid control apparatus joint and a fluid control apparatus, and more particularly to a joint suitable for use in a fluid control apparatus termed “integrated fluid control apparatus,” and a fluid control apparatus having the joint.

#2. Description of the Related Art

Brief description of the drawings6 figures

#FIG. 1 is a partially cutaway side view illustrating a first embodiment of a fluid control apparatus and a fluid control apparatus joint in accordance with the present invention.

#FIG. 2 is a partially cutaway perspective view illustrating the fluid control apparatus joint in FIG. 1.

#FIG. 3 is a partially cutaway perspective view illustrating a fluid control apparatus joint of a second embodiment of the fluid control apparatus and the fluid control apparatus joint in accordance with the present invention.

Detailed description3,367 words

#The embodiments of the present invention will now be described with reference to the accompanying drawings.

#FIG. 1 illustrates the first embodiment of the fluid control apparatus joint and the fluid control apparatus of the present invention. FIG. 2 illustrates the first embodiment of the fluid control apparatus joint of the present invention.

#The fluid control apparatus of the present invention relates to an improvement to an outlet on-off valve support structure (51) in the fluid control apparatus (1) including a plurality of lines (A), (B), (C), (D), (E), (F) as illustrated in FIGS. 5 and 6. An outlet on-off valve support structure (10) in the fluid control apparatus of the present invention includes an outlet on-off valve (7) as one of the fluid control devices arranged on an upper stage for each line, a single-line block joint (11) as one of the joint members arranged on a lower stage for each line, an plural-line block joint (12) as a joint member arranged over all the lines, and a fluid draw-off block joint (the fluid control apparatus block-joint) (21) in accordance with the present invention arranged between the outlet on-off valve (7), and the single-line block joint (11) and the plural-line block joint (12).

Facts

Application

14/310,253Filed 20 Jun 2014

Priority

JP 2013-13444727 Jun 2013

Published

US 2015/0000773 A11 Jan 2015

Granted

12 Apr 2016

Term ends

9 Oct 2034

Estimated · how

20 years from earliest known nonprovisional domestic filing plus recorded patent term adjustment, including 111 days of adjustment. Maintenance-fee lapses, terminal disclaimers and statutory extensions have not been checked. The continuity chain may be incomplete; this is not an enforceability determination.

Classification9 codes

F16K 27/003
Construction of housing ; Use of materials therefor: housing formed from a plurality of the same valve elements
F16L 39/06
Joints or fittings for double-walled or multi-channel pipes or pipe assemblies: of the multiline swivel type, e.g. comprising a plurality of…
F16L 41/03
Branch units, e.g. made in one piece, welded, riveted: comprising junction pieces for four or more pipe members
C23C 16/45561
Characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber: gas plumbing upstream…

Timeline

27 Jun 2013Priority claimedJP 2013-134447
20 Jun 2014Application filedUS 14/310,253
1 Jan 2015PublishedUS 2015/0000773 A1
27 Apr 2015Assigned to Fujikin Incorporatedassignment of assignor's interest
12 Apr 2016GrantedUS 9,309,983 B2
12 Oct 2026TodayWithin its term
9 Oct 2034Term endsEstimated, includes 111 days of adjustment

Fluid control apparatus joint, and fluid control apparatus

Life of this patent

Fluid control apparatus joint, and fluid control apparatus

Life of this patent

Life of this patent

Abstract

Drawings

Drawings

Claims6

Description5,785 words

Drawings

Classification9 codes

Life of this patent

Description5,785 words