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US 9,309,619 B2Granted
Method and apparatus for surface treatment of materials utilizing multiple combined energy sources
AssigneeMTIX Ltd.
InventorsPravin Mistry, Jahr Turchan
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Abstract
Material treatment is effected in a treatment region by at least two energy sources, such as (i) an atmospheric pressure plasma and (ii) an ultraviolet laser directed into the plasma and optionally onto the material being treated. Precursor materials may be dispensed before, and finishing material may be dispensed after treatment. Electrodes for generating the plasma may comprise two spaced-apart rollers. Nip rollers adjacent the electrode rollers define a semi-airtight cavity, and may have a metallic outer layer.
Claims17
A method for treating a substrate comprising:
- creating a high voltage alternating current atmospheric plasma by energizing two spaced-apart electrodes in a treatment region;
- directing a laser beam into the plasma;
- and
- shaping the laser beam to have a rectangular cross-section;
- wherein the laser beam interacts with the plasma, resulting in a hybrid plasma, and the laser beam also acts directly upon the substrate being treated;
- and
- wherein the beam from the laser is directed into the treatment region, at an angle greater than 0 degrees and less than 10 degrees, horizontal to a top surface of the substrate, so as to impinge on the surface of the substrate.
4 more elements
Dependencies are inferred from the claim text.