US 9,309,605 B2 · Monitoring leveler concentrations in electroplating solutions

Abstract

Provided herein are methods and apparatus for determining leveler concentration in an electroplating solution. The approach allows the concentration of leveler to be detected and measured, even at very low leveler concentrations. According to the various embodiments, the methods involve providing an electrode with a metal surface, exposing the electrode to a pre-acceleration solution with at least one accelerator, allowing the surface of the electrode to become saturated with accelerator, measuring an electrochemical response while plating the electrode in a solution, and determining the concentration of leveler in the solution by comparing the measured electrochemical response to a model relating leveler concentration to known electrochemical responses. According to other embodiments, the apparatus includes an electrode, a measuring apparatus or an electrochemical cell configured to measure an electrochemical response, and a controller designed to carry out the method outlined above.

Claims24

Dependent claims

A method of determining leveler concentration in a test solution, comprising:

(a) providing an electrode having a metal surface;
(b) exposing the electrode to a pre-acceleration solution comprising at least one accelerator compound and allowing the surface of the electrode to become substantially saturated with the at least one accelerator compound before removing the electrode from the pre-acceleration solution;
(c) exposing the substantially saturated electrode to the test solution and measuring an electrochemical response while plating the substantially saturated electrode in the test solution, the test solution having an unknown concentration of leveler;
and
(d) determining the concentration of leveler in the test solution by comparing the electrochemical response obtained in operation (c) to a model relating leveler concentration to known electrochemical responses.

2 more elements

Dependencies are inferred from the claim text.

Monitoring leveler concentrations in electroplating solutions

Life of this patent

Monitoring leveler concentrations in electroplating solutions

Life of this patent

Abstract

Claims24