Hard-material-coated bodies composed of metal, cemented hard material, cermet or ceramic and processes for producing such bodies
AssigneeFraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e. V.
InventorsIngolf Endler, Sebastian Scholz
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Abstract
Hard-material-coated bodies composed of metal, cemented hard material, cermet or ceramic, coated with a TiSiCN composite layer or with a multilayer layer system which contains at least one TiSiCN composite layer. The TiSiCN composite layer is a nanocomposite layer which has been produced by a thermal CVD process without additional plasma excitation and contains a nanocrystalline phase composed of TiCxN1-x having a crystallite size in the range from 5 nm to 150 nm and a second phase composed of amorphous SiCxNy. The layer is characterized by a high hardness, a high oxidation and heat resistance and a high adhesive strength.
Claims10
A hard-material-coated body of metal, hard metal, cermet or ceramic, coated with a TiSiCN composite coating or with a multi-layer coating system that contains at least one TiSiCN composite coating, wherein the TiSiCN composite coating is a nanocomposite coating with a halogen content of <1 atomic % and an oxygen content of <4 atomic %, which is produced via a thermal CVD technique without additional plasma excitation and which contains a nanocrystalline phase of TiCxN1-x with 0.1≦x≦0.99 with a crystallite size between 5 nm and 150 nm and a second phase of amorphous SiCxNy.
Dependencies are inferred from the claim text.