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US 9,309,446 B2Granted
Photosensitive adhesive composition, film-like adhesive, adhesive sheet, adhesive pattern, semiconductor wafer with adhesive layer, semiconductor device
AssigneeHitachi Chemical Company, Ltd.
InventorsKazuyuki Mitsukura, Takashi Kawamori, Takashi Masuko, Shigeki Katogi
Life of this patent
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Abstract
The present invention relates to a photosensitive adhesive composition that has thermal press bondability to an adherent after being patterned by exposure and development and enables alkali development, wherein a storage elastic modulus at 110° C. after exposure and further heat curing is not less than 10 MPa.
Claims24
A photosensitive adhesive composition that has thermal press bondability to an adherent after being patterned by exposure and development and enables alkali development, wherein
- the composition comprises an (A) alkali-soluble polyimide resin obtained by reacting a tetracarboxylic acid dianhydride with a diamine containing 10 mol % to 80 mol % of a phenolic hydroxyl group-containing diamine represented by formula (A-1) based on the diamines in total and an aliphatic ether diamine represented by formula (8):
- wherein R1, R2 and R3 are independently alkylene groups having 1 to 10 carbons atoms,
- wherein in the above formulae b is an integer between 2 and 80, and
- a storage elastic modulus at 110° C. after exposure and further heat curing is not less than 10 MPa.
1 more element
Dependencies are inferred from the claim text.