Micromechanical component and method for producing a micromechanical component
AssigneeRobert Bosch GmbH
InventorsHans Artmann, Jochen Reinmuth
Life of this patent
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AssigneeRobert Bosch GmbH
InventorsHans Artmann, Jochen Reinmuth
Estimating the term…
A micromechanical component is described having a first substrate that has a first front side a first rear side facing away from the first front side; first printed conductors that are fashioned on the first front side of the first substrate; a plurality of actuator devices that are fashioned on and/or in the first substrate and that are electrically bonded to the first printed conductors, the actuator devices each having at least one stator electrode and each having at least one actuator electrode that works together with the at least one stator electrode, which are fashioned such that a voltage can be applied between the actuator electrode and cooperating stator electrode in such a way that the actuator electrode can be displaced relative to the stator electrode.
A micromechanical component, comprising:
A method for producing a micro-electromechanical component, comprising:
Dependencies are inferred from the claim text.