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US 9,309,105 B2Granted
Sensor structure for sensing pressure waves and ambient pressure
AssigneeInfineon Technologies AG
InventorsAlfons Dehe, Roland Helm
Life of this patent
Estimating the term…
Abstract
In various embodiments, a sensor structure is provided. The sensor structure may include a first conductive layer; an electrode element; and a second conductive layer arranged on an opposite side of the electrode element from the first conductive layer. The first conductive layer and the second conductive layer may form a chamber. The pressure in the chamber may be lower than the pressure outside of the chamber.
Claims14
A sensor structure, comprising:
- a support structure having a first side;
- a first electrically conductive layer formed on the first side of the support structure;
- an electrode element arranged over the first conductive layer;
- and
- a second electrically conductive layer arranged on an opposite side of the electrode element from the first electrically conductive layer;
- wherein a portion of the first electrically conductive layer and a portion of the second electrically conductive layer form a first chamber where the pressure in the first chamber is lower than the pressure outside the first chamber and a further portion of the first electrically conductive layer and a portion of the electrode element form a second chamber where the pressure in the second chamber is lower than the pressure outside the second chamber.
3 more elements
A sensor structure arrangement, comprising:
- a sensor structure comprising:
- a support structure having a first side;
- a first electrically conductive layer formed on the first side of the support structure;
- an electrode element arranged over the first conductive layer;
- and
- a second electrically conductive layer arranged on an opposite side of the electrode element from the first electrically conductive layer;
- wherein a portion of the first electrically conductive layer and a portion of the second electrically conductive layer form a first chamber where the pressure in the first chamber is lower than the pressure outside the first chamber and a further portion of the first electrically conductive layer and a portion of the electrode element form a second chamber where the pressure in the second chamber is lower than the pressure outside the second chamber;
- and
- a circuit configured to detect at least one of a signal generated by a deflection of the first chamber and a signal generated by a deformation of the second chamber.
6 more elements
Dependencies are inferred from the claim text.