Method of making inkjet print heads having inkjet chambers and orifices formed in a wafer and related devices
AssigneeSTMicroelectronics S.r.l.
InventorsMurray J. Robinson, Kenneth J. Stewart
Life of this patent
Estimating the term…
Abstract
A method of making inkjet print heads may include forming recesses in a first surface of a first wafer to define inkjet chambers. The method may also include forming openings extending from a second surface of the first wafer through to respective ones of the inkjet chambers to define inkjet orifices. The method may further include forming a second wafer including ink heaters, and joining the first and second wafers together so that the ink heaters are aligned within respective inkjet chambers to thereby define the inkjet print heads.
Claims16
A method of making a plurality of inkjet print heads comprising:
- forming a plurality of recesses in a first surface of a first wafer to define a plurality of inkjet chambers in the first wafer;
- forming a plurality of openings extending from a second surface of the first wafer through the first wafer to respective ones of the inkjet chambers to define a plurality of inkjet orifices, the second surface being opposite the first surface;
- forming a second wafer including a plurality of ink heaters;
- and
- joining, after forming the plurality of recesses and the plurality of openings, the first and second wafers together so that the plurality of ink heaters are aligned within respective inkjet chambers to thereby define the plurality of inkjet print heads.
A method of making a plurality of inkjet print heads comprising:
- forming a plurality of recesses in a first surface of a first wafer comprising monocrystalline silicon to define a plurality of inkjet chambers in the first wafer;
- forming a plurality of openings extending from a second surface of the first wafer through the first wafer to respective ones of the inkjet chambers to define a plurality of inkjet orifices, the second surface being opposite the first surface;
- forming a second wafer including a plurality of ink heaters and control circuitry coupled thereto;
- and
- joining, after forming the plurality of recesses and the plurality of openings, the first and second wafers together so that the plurality of ink heaters are aligned within respective inkjet chambers to thereby define the plurality of inkjet print heads.
Dependencies are inferred from the claim text.