Mass transfer tool manipulator assembly
AssigneeLuxVue Techonology Corporation
InventorsDariusz Golda, John A. Higginson, Andreas Bibl, Paul Argus Parks, Stephen Paul Bathurst
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Abstract
Systems and methods for transferring a micro device from a carrier substrate are disclosed. In an embodiment, a mass transfer tool manipulator assembly allows active alignment between an array of electrostatic transfer heads on a micro pick up array and an array of micro devices on a carrier substrate. Displacement of a compliant element of the mass transfer tool manipulator assembly may be sensed to control alignment between the array of electrostatic transfer heads and the array of micro devices.
Claims17
A mass transfer tool manipulator assembly, comprising:
- a housing;
- a tip-tilt-z flexure including a top flexure component, a bottom flexure component, and a flexible coupling connecting the top flexure component with the bottom flexure component, wherein the top flexure component joins with the housing;
- an actuator assembly operably coupled with the bottom flexure component, wherein actuation of the actuator assembly moves the bottom flexure component relative to the top flexure component;
- and
- a micro pick up array mount having a pivot platform coupled with a compliant element, and a displacement sensor integrated with the compliant element, wherein the micro pick up array mount is coupled with the bottom flexure component.
Dependencies are inferred from the claim text.