Process for fabricating a magnetic tweezer
AssigneeCommissariat à l'énergie et aux énergies alternatives
InventorsBernard Dieny, Philippe Sabon, Hélène Joisten
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Abstract
Magnetic tweezers have two jaws formed by thin magnetic films connected together via a hinge. The magnetic tweezers include a nanoparticle formed by a stack of thin magnetic films. A process for fabricating the magnetic tweezers by techniques used in the fabrication of microelectronic components is presented.
Claims15
A process for fabricating a magnetic tweezer on a surface of a substrate, the magnetic tweezer comprising two jaws, the two jaws being magnetostatically coupled, the two jaws being interconnected by a deformable hinge arranged at a first side of each of the two jaws, each of the two jaws having a second side that is opposite the first side, the two jaws extending along a longitudinal direction between the first and the second side, the deformable hinge extending along a transverse direction that is perpendicular to the longitudinal direction, the two jaws configured to be moved one with relation to the other under the action of a magnetic field, the process comprising:
- forming a stack on the surface of the substrate, the stack comprising at least two magnetic thin layers between which a sacrificial layer is arranged, the at least two magnetic thin layers being magnetostatically coupled, a first of the at least two magnetic thin layers forming at least part of a first of the two jaws and a second of the at least two magnetic thin layers forming at least part of a second of the two jaws, the stack presenting a longitudinal section equal to a desired longitudinal section for the magnetic tweezer to be fabricated, the stack presenting a lateral edge that defines the first side of each of the two jaws;
- depositing the deformable hinge onto at least the lateral edge of the stack;
- and
- after the depositing step, eliminating the sacrificial layer.
Dependencies are inferred from the claim text.