Sintered fiber filter
AssigneeMott Corporation
InventorsDerek Burgess, Wayne F. White, Alfred M. Romano, Todd W. Pflugbeil, Richard D. Balazy, Kenneth L. Rubow, John E. Rosenberger
Life of this patent
Estimating the term…
Loading patent…
AssigneeMott Corporation
InventorsDerek Burgess, Wayne F. White, Alfred M. Romano, Todd W. Pflugbeil, Richard D. Balazy, Kenneth L. Rubow, John E. Rosenberger
Estimating the term…
Sintered fiber filters are provided that can afford high particle capture efficiency and/or low pressure drop during operation, and are useful in applications such as semiconductor processing. The shape of at least a portion of the individual fibers (e.g., metal fibers) used to make the filter have a three-dimensional aspect, which allows for a low packing density and high porosity filtration media. Certain filters have a cylindrical or tube-like shape with tapered ends of higher density. Methods of making such filters, for example, using axial pressing, are also described.
A method of making a sintered fiber filter element, the method comprising:
Dependencies are inferred from the claim text.