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US 9,304,316 B2Granted
Method and device for scanning light
AssigneeApple Inc.
InventorsYizhar Weiss, Mordekhai Velger, Sivan Natan-Knaz, Raviv Erlich, Alexander Sromin
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Abstract
A method of scanning a light beam is disclosed. The method comprises scanning the light beam along a first axis and scanning the light beam along a second axis, such that a functional dependence of the scanning along the first axis is substantially a step-wave, and a functional dependence of the scanning along the second axis is other than a step-wave.
Claims20
A scanning device, comprising:
- a micromirror;
- a rotor, which comprises a magnetic material attached to the micromirror;
- and
- a stator assembly, which comprises:
- a core having an air gap, which contains at least a portion of the micromirror and the magnetic material;
- and
- a coil arrangement comprising a conductive wire wound on the core so as to cause the core to form a magnetic circuit through the air gap in response to an electrical current flowing in the conductive wire, so that the rotor and the micromirror move in response to the magnetic circuit.
4 more elements
A method for manufacturing a scanning device, comprising:
- patterning and etching a substrate so as to provide a micromirror;
- attaching a permanent magnetic material to the micromirror;
- providing a core having an air gap;
- winding a conductive coil around the core so as to cause the core to form a magnetic circuit through the air gap in response to an electrical current flowing in the conductive coil;
- and
- positioning at least a portion of the micromirror and the permanent magnetic material in the air gap so that the micromirror moves in response to the electrical current.
3 more elements
Dependencies are inferred from the claim text.