Fixture for flattening sample in optical metrology
AssigneeBruke Nano, Inc.
InventorBryan Guenther
Life of this patent
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Abstract
A vacuum mechanism for flattening bowed panel samples includes a support structure with coplanar support elements and a fixture with a movable component actuated by a vacuum source. The movable component has a top surface disposed above the support elements when no vacuum is applied and is capable of being drawn to a substantially coplanar position with the support elements when actuated by the vacuum source. The top surface is fluidly connected to the vacuum source and adapted to adhere to the overlaying surface of the sample when vacuum is applied, thereby flattening the sample when the movable component is drawn in by the same vacuum source.
Claims5
A vacuum mechanism for flattening a bowed panel sample, comprising:
- a support structure including an outer frame, a plurality of coplanar beams, and a platform;
- clamping means for retaining the bowed panel sample during a measurement;
- a vacuum source;
- a fixture supported by said platform, said fixture comprising a piston slidably connected to a housing and actuated by said vacuum source, the piston having a top surface disposed above said coplanar beams when no vacuum is applied and being drawn to a substantially coplanar position with the beams when actuated by the vacuum source, the top surface of the piston being fluidly connected to the vacuum source and adapted to adhere to an overlaying surface of said bowed panel sample when vacuum is applied;
- a spring-loaded mechanism urging the piston upward;
- and
- a device coupled to the piston so as to limit a maximum extension of the spring-loaded mechanism.
Dependencies are inferred from the claim text.