US 9,297,825 B2 · Tilt mode accelerometer with improved offset and noise performance

Abstract

A single-axis tilt-mode microelectromechanical accelerometer structure. The structure includes a substrate having a top surface defined by a first end and a second end. Coupled to the substrate is a first asymmetrically-shaped mass suspended above the substrate pivotable about a first pivot point on the substrate between the first end and the second end and a second asymmetrically-shaped mass suspended above the substrate pivotable about a second pivot point on the substrate between the first end and the second end. The structure also includes a first set of electrodes positioned on the substrate and below the first asymmetrically-shaped mass and a second set of electrodes positioned on the substrate and below the second asymmetrically-shaped mass.

Claims21

Dependent claims

A single-axis tilt-mode microelectromechanical accelerometer structure for measuring acceleration along a single axis, the accelerometer structure comprising:

a substrate having a top surface defining a plane;
a first asymmetrically-shaped mass suspended above the substrate pivotable about a first pivot axis and asymmetric about a first non-pivot axis, the first pivot axis and the first non-pivot axis being within a plane parallel to the plane of the substrate;
a first suspension structure mechanically coupled to the first asymmetrically shaped mass and the substrate, the first suspension structure positioned substantially at the center of mass about the first non-pivot axis of along the first pivot axis of the first asymmetrically shaped mass.

Dependencies are inferred from the claim text.

Tilt mode accelerometer with improved offset and noise performance

Life of this patent

Tilt mode accelerometer with improved offset and noise performance

Life of this patent

Abstract

Claims21