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US 9,295,152 B2Granted
Device with a single crystal diamond substrate with a buried electrically conducting layer
AssigneeThe United States of America as represented by the Secretary of the Navy
InventorsBradford B. Pate, Matthew P. Ray, Jeffrey W. Baldwin
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Abstract
A device comprising a single crystal diamond substrate with a buried electrically conducting layer with μm square openings spaced apart milled into the diamond by ablating the carbon above wherein the step of ablating uses a diode pumped tripled Nd:YAG laser at 355 nm and wherein the square openings have electrical contacts and wherein the resistance measured between the square openings is dominated by the buried electrically conducting layer and on the order of about 1 kΩ.
Claims8
A device comprising:
- a single crystal diamond substrate having a first carbon surface;
- an electrically conducting carbon layer beneath the first carbon surface formed by implanting the diamond with a beam of 180 KeV followed by 150 KeV C+ ions at fluencies of 4×1015 ions/cm2 and 5×1015 ions/cm2 respectively;
- and
- a layer of ablated single crystal diamond wherein the layer lies between the electrically conducting layer and the first carbon surface.
1 more element
A device comprising:
- a single crystal diamond substrate with a buried electrically conducting layer with two 300×300 μm square openings spaced about 2.45 mm apart milled into the diamond by ablating the carbon above wherein the step of ablating uses a diode pumped tripled Nd:YAG laser at 355 nm wherein the Nd:YAG laser was focused about 0.5 mm above the first carbon surface the defocusing to an about 9 μm diameter beam spot laser output pulses of 17 μJ wherein the laser pulse duration is about 35 ns with a pulse frequency of 10 kHz and wherein the square openings have electrical contacts and wherein the resistance measured between the square openings is dominated by the buried electrically conducting layer and on the order of about 1 kΩ.
Dependencies are inferred from the claim text.