Method for producing mold for minute pattern transfer, method for producing diffraction grating using the same, and method for producing organic EL element including the diffraction grating

A method for producing a mold for minute pattern transfer, comprising:

• a step of applying a block copolymer solution made of at least a first polymer and a second polymer on a surface of a base member;
• a step of drying a coating film on the base member;
• a first heating step for heating the coating film after the drying at a temperature higher than a glass transition temperature of a block copolymer of the block copolymer solution;
• an etching step for etching the coating film after the first heating step to remove the second polymer so that a concavity and convexity structure is formed on the base member;
• a second heating step for heating the concavity and convexity structure at a temperature higher than a glass transition temperature of the first polymer;
• a step of forming a seed layer on the concavity and convexity structure after the second heating step;
• a step of or stacking a metal layer on the seed layer by an electroforming;
• and
• a step of peeling off the base member having the concavity and convexity structure from the metal layer and the seed layer.