US 9,291,578 B2 · X-ray photoemission microscope for integrated devices

Abstract

An apparatus is disclosed for the examination and inspection of integrated devices such as integrated circuits. X-rays are transmitted through the integrated device, and are incident on a photoemissive structure that absorbs x-rays and emits electrons. The electrons emitted by the photoemissive structure are shaped by an electron optical system to form a magnified image of the emitted electrons on a detector. This magnified image is then recorded and processed. In some embodiments, the integrated device and photoemissive structure are independently mounted and controlled. In other embodiments, the photoemissive device is deposited directly onto the integrated device. In some embodiments, the incidence angle of the x-rays is varied to allow internal three-dimensional structures of the integrated device to be determined. In other embodiments, the recorded image is compared with a reference data to enable inspection for manufacturing quality control.

Claims38

Dependent claims

An apparatus for the examination of an integrated device, comprising:

a source of x-rays;
a vacuum chamber;
a stage for holding an integrated device, positioned outside the vacuum chamber;
a window that allows the transmission of x-rays into the vacuum chamber;
a photoemissive structure within the vacuum chamber designed to emit electrons when exposed to x-rays;
an electron optical system within the vacuum chamber, designed to form a magnified image of electrons emitted from the photoemissive structure;
and
a means of adjusting the position and orientation angle of the stage holding the integrated device relative to the x-rays.

5 more elements

Dependencies are inferred from the claim text.

X-ray photoemission microscope for integrated devices

Life of this patent

X-ray photoemission microscope for integrated devices

Life of this patent

Abstract

Claims38