Deposition by spin coating of a patterned thin layer on a substrate
AssigneeCommissariat A L'energie Atomique Et Aux Energies Alternatives
InventorsThomas Sebastien, Messaoud Bedjaoui, Aboubakr Ennajdaoui
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Abstract
The method for producing a patterned layer of first material on a surface of a substrate comprises the following successive steps: arranging a particle on the surface of the substrate; depositing a resin by spin coating on the surface of the substrate so as to form the patterned layer of first material and a hole passing through the layer of first material and opening onto the particle; the material of the particle and the resin being chosen such that the particle exerts a repulsive interaction with respect to the resin.
Claims8
A method for producing a patterned layer made from first material on a surface of a substrate comprising the following successive steps:
- arranging a particle on the surface of the substrate;
- depositing a resin by spin coating on the surface of the substrate so as to form the patterned layer of first material and a hole passing through the layer of first material and opening onto the particle;
- the material of the particle and the resin being chosen such that the particle exerts a repulsive interaction with respect to the resin.
Dependencies are inferred from the claim text.