Method of fabricating crystal unit, crystal unit fabrication mask, and crystal unit package
AssigneeFujitsu Limited
InventorsHajime Kubota, Masayuki Itoh, Masakazu Kishi
Life of this patent
Estimating the term…
Abstract
A method of fabricating a crystal unit fills an adhesive from a first opening in a front surface of a mask of each of penetration holes in the mask in a state in which the mask is set on a base, into each penetration hole, and heats, by a heating element, a sidewall region defining a second opening in a back surface of the mask, in order to cure a sidewall part of the adhesive in the sidewall region defining each penetration hole in contact with the adhesive filling each penetration hole. A crystal blank is bonded on the base using the adhesive in order to form the crystal unit, after removing the mask from the base.
Claims6
A method of fabricating a crystal unit, comprising:
- filling an adhesive from a first opening located on a front surface side of a mask of each of a plurality of penetration holes in the mask in a state in which the mask is set on a base, into each of the plurality of penetration holes;
- heating, by a first heating element, a sidewall region defining a second opening located on a back surface side of the mask at an opposite side from the first opening, in order to cure a sidewall part of the adhesive in the sidewall region, excluding a sidewall region defining the first opening, of a sidewall defining each of the plurality of penetration holes and in contact with the adhesive filled into each of the penetration holes;
- and
- bonding a crystal blank on the base using the adhesive on the base in order to form the crystal unit, after removing the mask from the base.
Dependencies are inferred from the claim text.