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US 9,287,806 B2Granted
Electrostatic chuck
AssigneeSamsung Display Co., Ltd.
InventorSeong-Su Park
Life of this patent
Estimating the term…
Abstract
Provided is an electrostatic chuck capable of minimizing short circuits of electrodes due to scratches generated on a surface of the electrostatic chuck, and achieving stable absorption.
Claims18
An electrostatic chuck comprising:
- an absorption plate configured to absorb and support a target object;
- and
- a rectangular absorption electrode formed in the absorption plate configured to generate an electrostatic force between the target object and the absorption electrode,
- wherein the absorption electrode comprises:
- a first electrode pattern;
- and
- a second electrode pattern formed around the first electrode pattern, having an electrode width greater than the electrode width of the first electrode pattern, and having an area less than or equal to the area of the first electrode pattern;
- wherein the electrode width of the first electrode pattern is about 0.5 to about 1 mm.
5 more elements
Dependencies are inferred from the claim text.