Micromachined millimeter-wave frequency scanning array

Abstract

A frequency scanning traveling wave antenna array is presented for Y-band application. This antenna is a fast wave leaky structure based on rectangular waveguides in which slots cut on the broad wall of the waveguide serve as radiating elements. A series of aperture-coupled patch arrays are fed by these slots. This antenna offers 2° and 30° beam widths in azimuth and elevation direction, respectively, and is capable of ±25° beam scanning with frequency around the broadside direction. The waveguide can be fed through a membrane-supported cavity-backed CPW which is the output of a frequency multiplier providing 230˜245 GHz FMCW signal. This structure can be planar and compatible with micromachining application and can be fabricated using DRIE of silicon.

Dependencies are inferred from the claim text.