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US 9,287,491 B2Granted
Piezoelectric element, liquid ejecting head, and sensor
AssigneeSeiko Epson Corporation
InventorKazuya Kitada
Life of this patent
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Abstract
A piezoelectric element 300 includes a first electrode 60, a piezoelectric layer 70 arranged on the first electrode 60, and a second electrode 80 arranged on the piezoelectric layer 70, in which the piezoelectric layer 70 includes a composite oxide which has a perovskite structure and the composite oxide has a composition represented as a mixed crystal of bismuth ferrate and strontium titanate.
Claims9
A piezoelectric element comprising:
- a first electrode;
- a piezoelectric layer arranged on the first electrode;
- and
- a second electrode arranged on the piezoelectric layer,
- wherein the piezoelectric layer includes a composite oxide which has a perovskite structure, and
- wherein the composite oxide has a composition represented as a mixed crystal of bismuth ferrate and strontium titanate.
3 more elements
Dependencies are inferred from the claim text.